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Quantity Electronic charge e Electron mass tno Light velocity c Electric constant eo Magnetic constant [.ro Planck constant fr h: hlht Boltzmann constant k Bohr magneton ps Electron g-factor 1.602 177 . t0-Ls C 9.109 389. l0-3r kg 2.997 924. 108 m/s 8.854 187 . 10-r2 F/m 4r. l0-7 H/m: 12.566 370. l0-7 H/m 6,626075.10-3a J.s 1.054 572.10-3a J,s 1.380 658. t0-23 J/K 9.274015. t0-2r J/T 2.002 319 10-lo esu lo-28 g l01o cm/s 10-27 erg.s l0-27 er'g's l0-16 erg/K 10-21 erg/Gs 4.803 206. 9.109 389. 2.997 924. I I 6.626 07 5 . 1.054 572. L380 658. 9.274015. 2.002 319 Nonsystemic: h:4.135669.10-15 eV.s h:6.582122. l0-16 eV.s k :8.617 385 . l0- 5 eV/ K pg:5.788 382.10-5 eV/T Physical constants Relations between photon wavelength ?',, energy E and wave number & _ 1.239 s02f [pm] in air with refractive index n,:1.000 2749, 1 .239 842 ,1 VaCUUm.E [ev] k [cm-t1: 8 065.54 a [eV] in vacuum. I eV :8 065.54 cm-l in vacuum. I meV :8.06554 cm-r in vacuum. I cm-r :0.123 98 meV in vacuum. I eV :2.417 988. 1014 Hz, 1 .602 177 . I g- ro 1, 1.602 I 77 . 10 - 12 erg. I K :8.617 385' l0-5 eV. I eV : 1.160 445 . lO4 K. A. Dargys and J. Kundrotas }IANDBOOK on PTTYSICAT PROPERTIES of Ge, Si, GaAs and InP Vilnius, Science and @ Encyclopedia Publishers, 1994 UDK 621.315 Da 326 Adolfas Dargys Jurgis Kundrotas Serniconductor Physics Institute Goltauto 11, Vilnius I-ithuania SCIENCE AND ENCYCLOPEDIA PUBLISHERS Zvaisidiiq 23, Vilnius, Lithuania IsBN 5-420-01088-7 Copyright @ bV A. Dargvs aod J. Kundrotas 1994 Preface The data on main physical properties of technologically important semiconduc- tor crystals, germanium, silicon, gallium arsenide, and indium phosphide, are pre- sented. The choice of the semiconductors was dictated by two motives. First, they are the most thoroughly investigated materials and, second, they are of great im- portance for the semiconductor device fabrication. There exists a tremendous amount of information scattered in the pliysical literature on the properties of these semiconduciors. The handbook contains only the most fundamental bulk proper- ties of the single crystals. A few words about the use of the handbook may be helpful. Introduction (Chapter A) is followed by the main Chapter B of the physical data. The latter is divided into four Sections. The Section number and the first number of a Fisure or Table in Chapter B indicates the semiconductor, namely:I - germanium, 2 - silicon, 3 - gallium arsenide, 4 - indium phosphide. To present the physical properties of different semiconductors as as possible, the headings of the Subsections and their numbering in the as olle may see from the Contents, are divided into six main groups:I - lattice properties, 2 - band propcrties, 3 - optical properties, 4 - electrical properties, 5 - piezoelectric, thermoelectric and magnetic properties, 6 - impurity properties. The definitions ofthe physical properties presented in the handbook are given in the Introduction. Apart from English, the Subject index is also given in Lithuanian (Chapter C). In selecting the data for the handbook the preference was given to those physi- cal properties which are directly accessible to an experimentor. Where it was pos- sible the presented data have been approximated by empirical formulas. The hand- book is intended for solid state physicists, postgraduates and students arid can serve as a laboratory reference guide. The engineers who are interested in serniconductor rnaterial application will find the handbook usefui too. Finally, we are grateful to the authors and publishers who granted permission for the use of particular figures and tables. Most figures and tables that are inclu- ded in this handbook are in modified form to produce a uniform format, Sources are quoted with the individual captions. uniformly Chapter B, Contents A. Introduction" General remarks on the semiconductor properties and their definition 1. Lattice properties 2. Band properties 3. Opcical properties 4. Electrical properties 5. Piezoelectric, thermoelectric and magnetic properties . 23 5. Impurity properties . 25 7. Restrictions on the tensor components in the cubic semiconductors . 26 8. Physical constants 27 B. Physical data I. Physical data for germanium I .l . Gs Iatticc properties. 3l I.2. Ge band properties 38 1.3. Ce optical propertics 46 1.4. Gc electrical propertios 55 1.5. Gt: piczoelcctric, thcrmoelectric and rnagnetic properties 66 1.6. Cic impurity properties 73 2. Physical data for silicon 2.1. Si lattico properties 83 9l 98 109 124 130 143 150 158 170 179 182 2.2. Si band properties 2.5. Si piezoelectric, thermoelectric and magnetic properties . 2.6. Si impurity properties 9 12 17 2t 2.3. Si optical propertics 2.4. Si clectrioal properties 3. Physical data fnr gallium 3.1. GaAs latticc propcrties 3.2. GaAs band properties 3.3. GaAs optical properties 3.4. GaAs electrical properties 3.5. GaAs piezoelectric, thermoelectric and magnetic properties 3.6. GaAs impurity properties arsenide 4. Physical data for indium phosphide 4.1. InP lattice properties 189 196 202 2tL 219 222 4.2. lnP band properties 4.3. InP optical properties 4.4. InP electrical properties 4.5. InP piezoelectric, thermcelectric and magnetic properties 4.6. InP impurity properties C. References and subject index 1. References . 229 2. Subject index 247 3. Subject index in Lithuanian . 255 A. Introduction. General remarks on the semiconductor properties and their definition tr, Lattice properties Phonon dispersion relation. Lattice waves are charactcrizcd by wavc voct()r q aud frequency or. The function co, (q) is called the phonon dispcrsicn rclation of tirc .i-th branch. If <or+0 when q-+Q, the branch.T is called acouslic. If or, is nonzero when q->0, the branch.i is called optical. In additicl-., depeilciing on polarization of the r.vave, the branch may be longitudinal or trarsvcl'se. Phonols helonging to these blanches are consequently cited as longiiudinal acc,nstic (2,4), transvcrsc aconstic (77), longitudinal optical (LA) and transvel'so opiical (7O). If noccssal"-y, a subscript is added, for example, to indicate trvo ortirogcrral pr:lalizations ol transverse acoustic waves: TA1, TA2. The first Brillouin zone, nomenctrature of high syrnrnetr:y points anC lines for the phr:non branches are the sarne as for the electronic bands, Fig. l. Stress and strain tensors. For small deformations, when Hooke's larv holds, the se- cond-rank stress lensor o,, and strain tensor eij are related hy the f.ourth-rankcom- pliance te!1sor s;;p1 and elastic tensor c,;,,, [1] , -_!., -i.i - /, .ii*.tGkt. KI s. ntt: ), Ctitt;.tt.T For cubic semiconduciorr! tlrcsa tr:nsorial equatio:rs cal he ltrt into the fr.rllorvin.e rnatrix fotrn: ,!r t Jr-: 5l t ,rtt Sra Jrl 5rr 000 000 000 f) (.! 0 Jle 0 0 0 () 0 0 0 0 0 0 0 sar 000 0(l 0 000 cct 0 0 A coo 0 00cq* .tr r G,,' (i;z sEl 0 6.,- o;r 6xr 6r,, 6vl' 6", 6", 6fi 6*, (ltt (n (t,J Cn Ctt Cn C tz Ct't Cll 000 000 000 Here x, y, z ate directed along the crystallogr:aphic axes. The te:rsots Jy;11 &r1d c;;1; are written in thc abbreviatcd form (scc Section 7 for notation). ot J.' d-- il,; * i.t +Jl lntroduction Fig. 1. The first Brillouin zone for Ge, Si, GaAs and InP lattices rvith high symmetry points (I, K, L, U, X, W) and lines (4, A, X, Q, S, Z) indicated. For cubic semiconductors the following relal.ions exist belween the elastic and compliance tensor components: "r, :G,r*#z"J , sr, : ,",,-;,jft|..2.*y . ,oo: