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Semiconductor Physics and Devices: Basic Principles, 4 th edition Chapter 10 By D. A. Neamen Problem Solutions ______________________________________________________________________________________ Then 58 14 min 1000.3 7.11 9.3 10120 1085.89.3 C 810083.3 F/cm 2 C (inv) 710876.2 oxC F/cm 2 (b) 1f MHz (high freq), 710876.2 oxC F/cm 2 (unchanged) 710346.1 FBC F/cm 2 (unchanged) 8 min 10083.3 C F/cm 2 (unchanged) C (inv) 8 min 10083.3 C F/cm 2 (c) 10.1 msFBV V fpFB ox SD TN V C Q V 2 max Now dTaSD xeNQ max 51619 1000.310106.1 81080.4 C/cm 2 3473.0210.1 10876.2 1080.4 7 8 TNV 2385.0TNV V _______________________________________ 10.24 (a) 1f Hz (low freq), 8 14 10120 1085.89.3 ox ox ox t C 710876.2 F/cm 2 a st s ox ox ox FB eN V t C 1419 14 8 14 105106.1 1085.87.110259.0 7.11 9.3 10120 1085.89.3 810726.4 FBC F/cm 2 dT s ox ox ox xt C min Now 2697.0 105.1 105 ln0259.0 10 14 fn V 2/1 1419 14 105106.1 2697.01085.87.114 dTx 410182.1 cm Then 48 14 min 10182.1 7.11 9.3 10120 1085.89.3 C 910504.8 F/cm 2 C (inv) 710876.2 oxC F/cm 2 (b) 1f MHz (high freq), 710876.2 oxC F/cm 2 (unchanged) 810726.4 FBC F/cm 2 (unchanged) 9 min 10504.8 C F/cm 2 (unchanged) C (inv) 9 min 10504.8 C F/cm 2 (c) 95.0 msFBV V fnFB ox SD TP V C Q V 2 max Now dTdSD xeNQ max 41419 10182.1105106.1 910456.9 C/cm 2 Then 2697.0295.0 10876.2 10456.9 7 9 TPV 378.0TPV V _______________________________________ 10.25 The amount of fixed oxide charge at x is xx C/cm 2 By lever action, the effect of this oxide charge on the flatband voltage is xx t x C V oxox FB 1 If we add the effect at each point, we must integrate so that dx t xx C V oxt oxox FB 0 1 _______________________________________